Ion-plasma, electron beam and thermal deposition

SPUTTERING

Equipment and technologies for electron-beam and ion-plasma treatment of materials

The production and commercial company Sumy Electron Optics (SEO) works in the field of creating research equipment and vacuum technology for various fields of science and technology.

Using the modern equipment, new technologies and proprietary software products, the SEO firm carries out the following activities:

  • Using the modern equipment, new technologies and proprietary software products, the SEO firm carries out the following activities:
  • Designing and manufacturing of vacuum ion-plasma coating plants by various methods: electron beam (EB-PVD), arc-arc (Arc-PVD), magnetron sputtering (MS), ion beam (IBAD according to customer's specification).
  • Designing and manufacturing of vacuum installations for ion-plasma nitriding of machine parts. Modernization of industrial installations НШВ-28.7 / 6-И1, НШВ-9.18 / 6-И2, etc.
  • Design and manufacture of vacuum installations for the application of optical coatings (antireflection, interference, etc.).
  • Modernization of vacuum ion-plasma equipment (electric arc and magnetron sputtering plants) - Bulat-6, Bulat-3, NNV-6.6, MAP-1, VU-2M, VU-2MBS, etc.
  • Manufacture of units for vacuum ion-plasma deposition plants (cathode nodes, magnetrons, ion sources, gas leakage, etc.)

Vacuum installations of ion-plasma coating provide the application of functional wear, heat, erosion, cavitation and corrosion-resistant coatings on machine parts, application of nanostructured wear-resistant coatings on the tool: cutters, drills, including small ones (∅up to 1 mm), punches, dies, plungers and the like.

SPUTTERING

The manufactured vacuum equipment is designed and manufactured in full compliance with modern requirements for industrial vacuum installations. This is a modern element base and the most complete realization of technological capabilities of equipment due to automation of the process technology.

The ability to adapt to customer requirements is an important virtue of our company. We are ready to offer solutions that exactly match the customer's specifications, including unique engineering developments.

Almost any solution for the formation of thin films and coatings can be integrated into our equipment, while we can use the best components from market leaders, be they automation devices or vacuum components. The choice of equipment - for the customer.

All vacuum units are equipped with an automated process control system (ASUTP), which has undergone many years of industrial testing in the conditions of various serial productions. This allows us to solve typical tasks of the automated process control system - process technology for a given program, equipment diagnostics, emergency situations, creation and archiving of working protocols, and also to work in "manual mode".

The application of this system ensures the stability and repeatability of the properties and characteristics of the sprayed coatings and nitrided products from batch to batch meeting the current world level.

Especially it should be noted that we ourselves are developing software for our installations. If the majority of competitors order software on the side, which slows down its debugging and refinement and raises the cost, then we always equip the equipment with optimal software reliability and functionality.

In the case of equipment modernization, we perform not just a restoration, but a deep modernization of the spraying plants. Obsolete and exhausted components are replaced, including electronics, electrical equipment, separate technological modules. From the old installation, in fact, only the frame remains.

The equipment is equipped with modern software, and in terms of its capabilities, it is almost as good as new models of the same class, while the savings for the customer are very significant: the cost of the restored equipment can be 2 to 3 times lower than the new one with comparable characteristics. Restored plants are guaranteed.

The delivery of the equipment may include services for training the Customer's personnel and technological support of the equipment.

Below in the appendix the information illustrating some developments of installations of ion-plasma and electron-beam spraying is given.

SEO-EB TEC

Vacuum station SEO-EB TEC

The device is intended for coating optical surfaces by the method of resistive and electron-beam evaporation of dielectrics, semiconductors and metals with simultaneous control of coating thickness.

The station provides the possibility of applying multi-layer achromatic coatings on optical parts, as well as metallic, single-layer antireflective, interference mirror, filter and others for different spectral regions.

The station consists of: a working chamber, a pumping station based on TMP, a forvacuum unit, electrical equipment for power supply and control of the vacuum system and technological systems.

Specification
1 Pressure in the chamber, mmHg. 5×10-6
2 Time to reach vacuum, min, not more than 20
3 Temperature of heating in the chamber, °С 100 - 320
4 Number of resistive evaporators, pcs. 2
5 Number of electron-beam evaporators, pcs. 1
6 Number of holders of substrates, pcs. 4
7 Maximum size of substrates, mm 50 × 50
8 Plasma cleaning voltage, kV 2
9 Current of resistive evaporators, A, at 24 V 150
10 Current of electron-beam evaporator, mA, at 10 kV 500
11 Power consumed of station, kW 20
12 Control system From industrial computer
SEO-TEC-MS

Vacuum installation series SEO-TES MS

Vacuum installation for deposition of multifunctional nanocomposite coatings from Zr, Ti, Cr alloys by the method of reactive deposition with magnetron spreading in the DC / PULSE mode

The SEO-TES MS installation is designed to apply protective and functional coatings of 10-25 microns thick from multicomponent materials, including special alloys or nanocrystalline composites, as well as metallic, oxide, nitride, carbide and other types of coatings for products of various purposes made of steels and titanium alloys, in particular GTE blades

Software with functions:

  • automatic pumping mode;
  • manual pumping mode;
  • display the mnemonic scheme of operation and all parameters of the control system of the installation on the monitor screen;
  • programming of spraying modes and their reproduction;
  • blocking the operation of the installation in the event of an emergency and the incorrect operation of the installation systems.
Specification
1 Supply network: 380V / 50Hz (60Hz)
2 Power consumption, kVA, no more than 60
3 Cooling closed water, stationary
4 Installation weight, kg, no more than 2000
5 Dimensions:
(length, width, height), mm, not more

2800 × 3500 × 2100
6 Time to reach working vacuum, min, not more than 20
7 Spraying system magnetron
7.1 Type of magnetron:
with hot target;  
unbalanced;  
balanced;
8 Ionic source: multicellular
- working gas
 
- the length of cleaning parts, mm
- source installation
argon
200
external
9 Power supply system
9.1 Magnetron power supply system:
- maximum power consumption of 1 channel, kW
- input voltage, V
- output current, A
- mode of operation
- frequency, kHz
13,6
65 - 650
0,1 - 18,5
DC, PULSE
1 - 100
9.2 Ion Source Power Supply:
- supply network:
- maximum output power, kW
- maximum output current, A
three-phase
2
1,0
10 Gas filling system 3 independent channels(H2; C2H2; Ar)
11 Carousel: planetary type
- the speed of rotation of the carousel around its axis, 1/min
- speed of rotation of satellites around its axis, 1/min
- number of mechanisms for fixing parts, шт.
0 - 10
0 - 10
16
12 Power supply of bias potential:
- output power, kW
- output voltage, V
- mode of operation
0,1 - 6,0
10 - 300
DC, PULSE
13 Heater resistive
- product heating temperature, up to °C 500
14 Controlled protective screens for magnetron sprays
15 Control computer candybar with touch 17″ monitor
- operating system Windows 7/32
16 Software SEO ТЕСН Control
(Copyright registration № 27337)
SEO-EBPVD

Installation of the SEO-EBPVD TEC series for the application of ceramic coatings

Electron Beam Unit SEO-EBPVD TES is designed to apply ceramic layers of heat-shielding coatings (HCS) to protect against high-temperature gas corrosion of turbine rotor blades from stabilized zirconia.

Such coatings allow increasing blade life by 3-5 times. Scope of application: laboratory and production areas of ion-plasma and gas-thermal coatings.

The installation includes:

  1. Water cooled chamber composed of:
    • loading module with sample movement mechanism
    • heating module with a resistive type heater (can be heated by a gun) and a temperature monitoring system
    • a sputtering module with a rotating mechanism for specimens, a crucible, and a supply mechanism for the evaporated stick
  2. Vacuum system based on a diffusion vapor-oil pump
  3. Electron Beam Cannon
  4. Stroboscopic viewing window
  5. Control cabinet with high-voltage gun power source
  6. Cooling system of the chamber, crucible and gun
  7. Pneumatic system for operation of the drive for supply of samples and elements of the vacuum system
  8. Gas supply system
SEO-EBPVD

The control program provides:

  • automatic and manual control of the vacuum system;
  • display the mimic diagram of the vacuum system on the monitor screen;
  • programming and playback of spraying modes;
  • control of accident-free operation of the plant
Specifications
1 Supply Network 380 V, 50/60 Hz , three-phase
2 Power consumption, kV A, no more than 35
3 Cooling installations stationary cooling station
4 Installation weight, kg, no more than 11000
5 Overall dimensions of the installation (length, width, height), mm 4000 × 2000 × 2000
6 Vacuum system Two-stage on the basis of the diffusion steam-oil pump
7 Working pressure in the sputtering module, Torr mmH, not more than: 1×103 - 1×104
8 The preheating temperature of the articles, °С 950±50
9 Gas filling system 2 channels (O2, Аг)
10 The crucible for evaporation water-cooled 40mm
11 Movement of the column in the crucible along the vertical axis, mm from 150
12 Visualization and observation of the evaporation process stroboscopic sight glass
13 Electron Beam Cannon cold-cathode discharge
- electron beam power, kW
- accelerating stress, kV
- electron beam scanning frequency, Hz, not more than
- sweep shape
from 20
from 20
100
spiral concentric
14 Installation Management System computer
15 Software SEO ТЕСН Control
(Copyright registration № 27337)
SEO-EBPVD

Vacuum installation series SEO-TES ArcPVD / MS ion-plasma spraying

The vacuum installation of the SEO-TEC ArcPVD / MS series is designed to apply protective and functional coatings of 0.5-50 μm thickness from multicomponent materials, including special alloys or nanocrystalline composites, as well as metallic, oxide, nitride, carbide, carbonitride, oxycarbide and other types of coatings using dual magnetron and arc evaporators.

SCOPE OF APPLICATION: vacuum evaporation laboratories for research and production enterprises.

The installation includes:

  1. Technological rack:
    • power rack;
    • water distribution system;
    • the vacuum chamber;
    • ion cleaning unit;
    • dual magnetrons;
    • dual arc evaporators;
    • heater;
    • carousel;
    • disk shutter;
    • turbomolecular pump;
    • pneumatic flaps of the foreline;
    • vacuum sensors;
    • gas inlet system.
  2. Control system stand
  3. Vacuum Pumping Station
  4. Pneumatic system
SEO-ARCPVD

The control program provides:

  • automatic and manual control of the vacuum system;
  • display the mimic diagram of the vacuum system on the monitor screen;
  • display of the sensors on the monitor screen;
  • display controls on the monitor screen;
  • independent control of evaporator currents;
  • independent control Open / close evaporator screens;
  • independent control of the heater temperature;
  • independent change of temperature (heater)
  • programming and playback of spraying modes;
  • blocking the operation of the installation in emergency situations.
Specifications
1 Supply network: 380V/50Hz three-phase
2 Power consumption, kVA, no more than 25
3 Installation weight, kg, no more than 648
4 Dimensions:
(length, width, height), mm, not more

2000 × 2000 × 1800
5 Time to reach working vacuum, min, not more than
20
6 Spraying systems:
6.1 Magnetron:
  • number of magnetrons
  • magnetron type
  • mode of operation of magnetrons
  • diameter / thickness of cathode, mm

2 dual
balanced / unbalanced
DC/PULSE
95/8,5
6.2 Vacuum-arc:
  • number of nozzles

2 dual
7 Ion source: Multicell (22 ion beams)
  • working area, mm
400
8 Power supply systems:
8.1 Magnetron power supply system:
  • output power of 1 channel, max, kW
  • output voltage, V
  • output current, A
  • mode of operation
  • frequency, kHz
  • amplitude of arson, V

10
70 - 700
0,1 - 16
DC, PULSE
1 - 100
1000
8.2 Arc Power Evaporator Power Supply System:
  • output current of 1 channel, А
  • output voltage, V
  • no-load voltage, V
  • adjustment
4 inverter units
90 - 150
90
100
current
8.3 Power supplies ion source:
  • maximum output power, kW<
  • output voltage, V
  • maximum output current, A

2
400 - 5000
1,5
9 Gas filling system 3 channels
  • gas supply in channels
  • controlled level of leakage, Torr*l/s
  • the maximum throughput, l/min
independent
10
6
10 Carousel: planetary type
  • diameter of carousel, mm
  • speed of rotation around the central axis of the carousel, 1/min
  • number of mechanisms of fastening parts
180
1 - 10
6
11 Power supply of bias potential:
  • voltage adjustment range, V
  • maximum current, A
10 - 1000
7
12 Heater: resistive
  • maximum heating temperature, °C
560
13 Managed protective screens for:
magnetron sprays
arc diffusers
ion source
14 Control computer: Candybar Advantech with 17″ monitor
15 Software SEO ТЕСН Control
(Copyright registration № 27337)